Inficon vacuum gauge is an instrument used to measure gas pressure in high vacuum areas (ranging from low air density to below atmospheric pressure). Its working principle is based on the collision between gas molecules and surfaces, as well as the motion characteristics of gas molecules under vacuum conditions.
There are many types of instruments that work on different principles, such as the flow of hot electrons and cathode anions, high flow absorption, volumetric pressure measurement, and vibration methods. Different vacuum gauges have different characteristics, advantages and disadvantages, and suitable instruments can be selected according to actual needs.
The basic principle of Inficon vacuum gauge:
It consists of two electrodes, one of which is the anode (cathode ray tube or electron gun) and the other is the cathode (receiver). When a high-voltage power supply is applied, the anode will emit an electron beam, which collides with gas molecules when passing through the vacuum area, causing ionization and generating electron ion pairs. These ion pairs move under the drive of an electric field and generate current on the cathode surface.
By adopting different electrode structures and circuit designs, vacuum gauges can achieve different measurement ranges and sensitivities. Among them, the hot cathode vacuum gauge utilizes the principle of hot electron emission to generate electrons in the vacuum region, and calculates gas pressure through collisions between electrons and gas molecules; The cold cathode vacuum gauge measures gas pressure through gas adsorption and desorption on the cathode surface, and its sensitivity is higher than that of the hot cathode vacuum gauge, making it suitable for a wider measurement range.
In summary, Inficon vacuum gauges have a wide range of applications, such as solar cells, material research in the field of microelectronics, semiconductor processing plants, and aviation manufacturing plants. Different vacuum gauges have different measurement ranges, volumes, sensitivities, and other characteristics. Therefore, when selecting and using a vacuum timer, it is necessary to evaluate the actual situation in order to choose the appropriate instrument.