The modular SEM platform is suitable for intuitive operation, routine testing, and research applications

The EVO series combines high-performance scanning electron microscopy with an intuitive and user-friendly interface experience, while also attracting experienced and new users. Whether in the fields of life sciences, materials science, or routine industrial quality assurance and failure analysis, EVO can be tailored to your requirements with a wide range of optional configurations.

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• Multi functional solutions for microscope centers or industrial quality assurance laboratories

• Different vacuum chamber sizes and stage options to meet all application requirements - even for large industrial component samples

• Using LaB6 filament can achieve excellent image quality

• Excellent imaging and analysis performance for samples with non-conductive and non-conductive coatings

• Multiple analysis detectors can be configured to meet the needs of various microscopic analysis applications

advantage

Convenient availability

SmartSEM Touch allows interactive workflow control with your fingertips. It is simple and easy to learn, greatly reducing the effort and cost of training, and even new users can capture stunning images in just a few minutes. This user interface also supports industrial operators who require automated workflows to perform repeatable inspection tasks.

Excellent image quality

EVO excels at obtaining high-quality data on untreated and non-conductive coated samples. EVO also allows samples to retain their original state, maintaining the data quality of water containing and heavily contaminated samples. In addition, when imaging and microanalysis face challenges, using LaB6 filament can provide better resolution, contrast, and signal-to-noise ratio.

EVO can be associated with other devices

EVO can be used as part of a semi-automatic, multi-mode workflow to achieve information integrity by repositioning areas of interest and collecting data in multiple ways. Combine optical and electron microscope images for material characterization or part inspection, or associate EVO with Zeiss optical microscope for particle size analysis.

Suitable for more users to operate

It is very convenient for both experienced and novice users to operate

In actual laboratory environments, the operation of SEM is usually the exclusive domain of microscopy experts. However, for non expert users, operating SEM becomes challenging, such as students, trainees, or quality engineers, who often also need to obtain data from SEM. EVO considers the needs of both types of users simultaneously, with user interface options that can meet the operational needs of experienced microscope experts as well as non professional users.

Expert users

Preferred user interface: SmartSEM

Expert users can obtain and set advanced imaging parameters and analysis functions.

SmartSEM: Control Interface for Experienced Users

Novice users

Preferred user interface: SmartSEM Touch

Novice users can use pre-defined workflows and commonly used parameters - very suitable for beginners.

SmartSEM Touch is a simplified graphical user interface that runs on touchscreen computers

Intelligent Navigation and Imaging

Greatly improve the testing efficiency of samples and generate more data output

Zeiss Navigation Camera

The camera can be installed in front of the chamber to monitor the relative position between the sample, backscatter detector, and the bottom of the objective lens (chamber camera); Or install it above the vacuum chamber door (navigation camera) and use a top view to view the placement of samples on the sample stage. This view can be used to set predefined positions identified from optical microscope images and easily navigate throughout the entire sample testing process.

Automated intelligent imaging

EVO has achieved automatic and unmanned image acquisition of sample batches. Zeiss automated intelligent imaging is very suitable for routine inspections. It enables users to customize boundary regions, automatically generate desired views or regions of interest determined by magnification, and start automatically acquiring images. Automated intelligent imaging will greatly improve the efficiency of sample testing and generate more data.

Elevate your research to a higher level

Using lanthanum hexaboride electron emitter can obtain better images

Compared to traditional tungsten hairpin filaments, the electrons emitted by lanthanum hexaboride cathodes can ensure the additional image quality you need. This advantage is reflected in the following two aspects:

• At equal electron probe sizes (i.e. resolutions), there are more probe currents available for use, making image navigation and optimization easier

• At equal probe currents (signal-to-noise ratio), the spot diameter is much smaller, thereby improving image resolution
  

Catalyst particles with high magnification under low acceleration voltage (left: using tungsten filament, right: using LaB6 filament)
When under challenging imaging conditions, users using LaB6 filaments will have up to 10 times the beam brightness, thereby improving image resolution and contrast.

EVO can be associated with other devices

The benefits of workflow automation and associated microscopes

Shuttle&Find combines EVO, optical microscope, and digital microscope into an associated, multimodal workflow

As Zeiss is an excellent supplier of various types of microscopes and metrology systems, you can also combine EVO with other Zeiss solutions to enhance its functionality.

By using Shuttle&Find (the software and hardware components of Zeiss associated microscopes), you can establish an efficient multimodal workflow between (digital) optical microscopes and EVOs. By combining the unique optical comparison method of optical microscopy with the equally unique scanning electron microscopy imaging and analysis method, complementary data can be obtained to gain a clearer understanding of the material, quality, or failure mechanism of the sample.

Zeiss SmartEDX

Integrated EDS Solution for Conventional SEM Microscopic Analysis Applications

If SEM imaging technology alone cannot fully understand the components or samples, researchers will use energy dispersive spectroscopy (EDS) to collect spatial distribution information of elemental chemical composition.

• Optimized for conventional microscopic analysis applications

The combination of SEM and EDS must be carefully considered. The SmartEDX on EVO is highly suitable for routine microscopic analysis applications, especially for customers who require high data repeatability. It has high flux at 129 eV energy resolution and 1-5 nA probe current (typical EVO operating conditions). Thanks to the excellent transmittance of silicon nitride windows, SmartEDX is more suitable for detecting low-energy X-rays from light elements.

• Workflow guided graphical user interface

SmartEDX aims to improve usability and workflow repeatability in multi-user environments. Like other Zeiss workflow guided software solutions such as SmartSEM Touch, ZEN core, or EVO's Shuttle&Find, SmartEDX software is easy to learn, intuitive to use, and helps ensure repeatability in performing analysis tasks on SEM, especially in environments where multiple operators use the system.

• Comprehensive Zeiss services and system support
  
  SmartEDX is fully supported by Zeiss, making this EDS solution ideal for customers who want to streamline the number of analytical equipment suppliers. Zeiss is fully responsible for all installation, preventive maintenance, warranty, diagnosis and repair, spare parts logistics, and the entire system service contract, providing one-stop support for your SEM analysis solution.
  

EVO series

Vacuum chamber size selection

	Zeiss EVO 10	Zeiss EVO 15	Zeiss EVO 25
	Choosing EVO 10 (optional with BSD and EDS) is the entry point for you to purchase a scanning electron microscope at a very affordable price. Even though this EVO vacuum chamber is small, it is different from a desktop electron microscope. Your investment in EVO now ensures that you are ready for future applications that require more space and ports.	The EVO 15 fully demonstrates the flexibility concept of the EVO family and excels in analytical applications. By choosing the larger vacuum chamber of EVO 15 and adding a variable pressure mode for imaging and analysis of non-conductive samples or parts, you will have a multifunctional and versatile microscope equipment or industrial quality assurance laboratory solution.	EVO25 is the main solution for industry, with enough space to accommodate even larger components and assemblies. The optional 80 mm Z-axis travel stage can further expand the functionality of EVO 25, which can handle samples weighing up to 2 kilograms or even tilt. In addition, the large vacuum chamber will be able to accommodate multiple analytical detectors to meet the demanding requirements of microanalysis applications.
Maximum sample height	100 mm	145 mm	210 mm
Maximum sample diameter	230 mm	250 mm	300 mm
Electric stage travel XYZ	80 x 100 x 35 mm	125 x 125 x 50 mm	130 x 130 x 50 (or 80) mm
High Vacuum Mode (HV) Imaging and analysis of the quality of conductive samples
Variable Pressure Mode (VP) High quality imaging and analysis of non-conductive and non sprayed conductive layer samples
Extended Pressure Mode (EP) Imaging of water containing or contaminated samples in their natural state

Application case of Zeiss EVO

Application examples

• Production and assembly enterprises

• Electronic industry

• Steel and other metals

• raw material

• material science

• life sciences

• judicial expertise

• Production and assembly enterprises

  

  Zinc phosphate electrocoating, imaging using SE detector in high vacuum mode

  

  Car seat cushion foam, BSE detector is used for imaging in variable vacuum mode, and the sample is not sprayed with conductive layer

  

  Stainless steel fracture surface, secondary electron imaging in high vacuum mode

• Quality Analysis/Quality Control

• Failure analysis/metallographic analysis

• Cleanliness inspection

• Particle morphology and chemical analysis to meet the standards of 1 and 2 in ISO 16232 and VDA 19

• Analysis of non-metallic inclusions