Precision isolation optical platform - Optical platform - Air floating optical platform h-TDI

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精密隔振光学平台–Optical platform–Air floating optical platformThe h-TDI series is a 3D vibration reduction system developed by HERZ Corporation in Japan. This series精密隔振光学平台Improved the SHG technology of the original TDI vibration reduction system, using ultra-high performance 3D air springs combined with a high damping frame, which can isolate vibrations of six degrees of freedom in three dimensions. It is suitable for precision instruments such as optical microscopes, interferometers, and profilometers, and can provide users with excellent passive vibration isolation performance. The series is developed by HERZ Corporation in Japan精密隔振光学平台A 3D vibration reduction system. This series improves the SHG technology of the original TDI vibration reduction system by using ultra-high performance 3D air springs combined with a high damping frame, which can isolate vibrations of six degrees of freedom in three dimensions. It is suitable for precision instruments such as optical microscopes, interferometers, and profilometers, and can provide users with excellent passive vibration isolation performance.

Working principle of Herz optical platform:

Floors installed with measuring and manufacturing equipment may experience varying degrees of vibration. If these vibrations have adverse effects on the equipment, the most effective solution is to use an optical platform - precision vibration reduction stage - electron microscope vibration isolation stage (vibration reduction stage) to create the most suitable conditions for the equipment.

The passive isolation table absorbs incoming vibrations and consumes vibration energy for isolation with its unique soft motion, easy to move shape, and appropriate weight. Therefore, soft materials such as anti vibration rubber and air springs, as well as parts that can move gently, are important elements of passive vibration isolation platforms. The passive isolation platform can support equipment weighing tens of tons by changing the spring strength or increasing the number of springs.

Compared to the total weight M of the anti vibration support (on the spring), the air spring type isolation table aims to maintain a balance between the total value of the "spring pressure compression area S", "spring internal pressure P", and "number of springs N (number of supports)" multiplied under static load. When a dynamic load situation occurs (an unbalanced state caused by the movement of the center of gravity of M), the variable load component (Δ M) is automatically corrected by a mechanical valve or manually corrected by a closed valve to correct the internal pressure. The air spring type vibration isolation table uses the viscous resistance of the spring material and the air (gas) resistance of the enclosed pressure as loss coefficients. In order to improve the vibration isolation effect, the internal volume of the air spring (spring chamber) and the internal volume of the auxiliary gas tank (damping chamber) are connected to each other through a throttle hole (throttle valve), and air damping is performed through the throttle hole. This auxiliary gas tank is one of the main factors in regulating natural frequency. The advantage of this control method is that it can achieve maximum effect through low-cost component configuration, such as pressure operation through mechanical valves (pressure IN/OUT/EXH) and flow rate/flow regulation through throttle holes or speed controllers.

Technical Specifications:

• Model: h-TDI ※ Optional h-TDIS
• Vibration reduction method: Vertical direction - HERZ vibration reduction air spring, horizontal direction - Herz high-performance horizontal vibration isolation system
• Number of air springs: 4-6
• Damping method: Air damping is applied vertically through throttle holes, and high-performance damping with special rubber is used horizontally
• Natural frequency: about 1.3Hz in the vertical direction/about 0.6Hz in the horizontal direction (when carrying equal maximum weight)
• Leveling method: equipped with 3 mechanical automatic leveling sensors
• Gas supply method: Separate gas sources for supply
• Required air pressure: 0.3-0.7MPa (3-7kgf/c ㎡) ※ Optional manual air supply
• Workbench material: Top plate magnetized stainless steel plate 5t, bottom plate hot-rolled low-carbon steel plate 4.5t ※ Optional demagnetized stainless steel plate
• Honeycomb panel material: aluminum/steel honeycomb panel ※ Optional demagnetized stainless steel honeycomb panel
• Surface treatment: Tapping M-6 · 25mm matrix standard machining (optional) Surface unpainted (※ with black coating)
• Load capacity: 150-1000Kg (depending on specific model)
• Overall weight: 197-3400 Kg (depending on specific model and panel material)
• Dimensions: Depending on the specific model (107LA-6015LA)

Upgrade options:

• High damping frame
• Panel options: Choose from high damping honeycomb panels, stone slabs, and cast iron panels according to your needs

Vibration reduction effect - Hertz optical platform:

The h-TDI series electron microscope anti vibration table can effectively reduce vertical and horizontal vibration, and with a high damping frame, it can minimize displacement caused by external impact.