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Beijing Jinkun Technology Co., Ltd
Spatial Light Modulator SLM
NegotiableUpdate on 03/18
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Overview
This Spatial Light Modulator (SLM) can be applied to any situation that requires continuous modulation of a light beam. One of its applications is for * * photolithography mask plates.
Product Details
Spatial Light Modulator SLMCharacteristics: This modelSpatial Light Modulator (SLM)It can be applied to any situation where continuous modulation of the light beam is required. One of its applications is for * * photolithography mask plates.
Data of one pixel SLM (1M pixels)Spatial Light Modulator SLMThe indicators are as follows:
Parameter Value Remark
Matrix size 2048 × 512 mirrors
Pixel size 16 × 16 μm²
Frame rate 2 kHz
Mirror edge deflection 0 - 180 nm up to 350 nm possible
Wavelength 248 nm up to ca. 1500 nm possible
Average beam power 40 mW elevated power possible; wavelength dependent
Data voltage 0 - 25.5 V analogue
Data inputs 256
This modelSpatial Light Modulator SLMConstructed using a micro electromechanical system, please refer to the following for detailed instructions:
The devices are so called MOEMS (Micro Opto Electro Mechanical System). Micromirrors are fabricated with a pitch of >10 μm using thin film technology on top of a planarized CMOS backplane. The circuit provides electrodes underneath the mirrors to supply each mirror with individual voltages. The voltage difference between the electrode and the mirror generates an electrostatic force that deflects the mirror towards the electrode. The mirror material is a highly reflective
aluminium alloy. Mirrors made from alternative materials and coatings for high reflectivity for very demanding applications
are available or under development.
Data of one pixel SLM (1M pixels)Spatial Light Modulator SLMThe indicators are as follows:
Parameter Value Remark
Matrix size 2048 × 512 mirrors
Pixel size 16 × 16 μm²
Frame rate 2 kHz
Mirror edge deflection 0 - 180 nm up to 350 nm possible
Wavelength 248 nm up to ca. 1500 nm possible
Average beam power 40 mW elevated power possible; wavelength dependent
Data voltage 0 - 25.5 V analogue
Data inputs 256
This modelSpatial Light Modulator SLMConstructed using a micro electromechanical system, please refer to the following for detailed instructions:
The devices are so called MOEMS (Micro Opto Electro Mechanical System). Micromirrors are fabricated with a pitch of >10 μm using thin film technology on top of a planarized CMOS backplane. The circuit provides electrodes underneath the mirrors to supply each mirror with individual voltages. The voltage difference between the electrode and the mirror generates an electrostatic force that deflects the mirror towards the electrode. The mirror material is a highly reflective
aluminium alloy. Mirrors made from alternative materials and coatings for high reflectivity for very demanding applications
are available or under development.
