Three dimensional optical profilometer CONTEBGT-X

The three-dimensional optical profiler provides high-performance non-contact surface measurement for laboratory research and production process control. Combined with the tenth generation white light interferometry (WLI) and its design, this metrology system provides a high vertical resolution that exceeds the industry's largest field of view. The main functions include full automation and production interface, large electric XYZ level, head tilt/tilt, and a complete air isolation platform. To meet the rigorous needs of research and development, quality assurance, and process quality control from the ground, the CONTEBGT-X provides the ultimate measuring tool capability with three-dimensional optical accuracy and robustness.

Production Preparation Design and Reliability

The CONTEBGT-X combines Bruker's Bricklay * */tilt head, Bricklay's self calibrating laser reference, integrated pattern recognition, and many other proprietary interferometric measurement techniques to provide very * * surface metrology and high-throughput. The automated configuration of this system can quickly optimize almost any production environment, and its features include an air stage stabilizer kit for enhancing the accuracy of X, Y, and Z wafer placement, as well as a vacuum card tray for integrating PDU, EMO, and vacuum systems, and modified for automatic loading of end effector compatibility.

High precision and high-resolution imaging

The CONTEBGT-X Mobile XY Stage offers 12 inch coded motion in both X and Y directions This platform supports automated routines, such as multi-point data collection and stitching functionality for large-scale analysis. The 0.5 micron encoder provides reliable and repeatable automation and sample positioning. The example positioning provides convenience for operators through intuitive joysticks and software interface controls.

Intuitive surface measurement and analysis software

Bruker's Vision64 operation and analysis software provides the industry's most practical and streamlined graphical user interface, combining intelligent architecture with intuitive visual workflows and user-defined extensive automation features for fast and efficient data collection and analysis. An advanced production interface that allows the CONTEBGT-X to adapt to almost any production environment and automation process. This interface provides tools for customizing process workflows, automatic mapping, and load measurement formulas.