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Gongyi Yuhua Instrument Co., Ltd. (Headquarters)

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The technical paradigm of closed high and low temperature integrated machine from precision temperature control to full process calibration
Date: 2025-12-26Read: 8
In the fields of semiconductor manufacturing, biopharmaceutical research and development, and materials science,The sealed high and low temperature integrated machine, with its ultra wide temperature range of -120 ℃ to 300 ℃ and ± 0.1 ℃ temperature control accuracy, has become the core equipment for dynamic constant temperature control.The fully enclosed circulation system achieves efficient utilization and zero leakage risk of the heat transfer medium through the coordination of plate heat exchangers and magnetic driven pumps, while the design of the expansion vessel further reduces the probability of medium oxidation and moisture absorption. However, the performance stability of such equipment needs to be guaranteed through strict calibration procedures. The following analyzes its core process from three aspects: technical standards, operating specifications, and maintenance points.

  1、 Verification Technical Standard: Double Verification from Hardware to Software
1. Temperature parameter verification
According to the SEMI S2-0712 industry standard, the equipment needs to complete tests for heating rate, cooling rate, and temperature uniformity (≤± 0.5 ℃) under no-load conditions.
2. Security protection mechanism detection
The verification needs to cover safety modules such as leakage protection, overload alarm, and over temperature shutdown. Taking a certain brand of equipment as an example, its refrigeration system uses R404A refrigerant. When the compressor current exceeds 10% of the rated value, the intelligent control system will automatically cut off the power and display a fault code through the touch screen.
  2、 Operation specification: Full process control from start-up to shutdown
1. Preparation before the experiment
Check the appearance of the equipment for any damage, confirm that the liquid level of the thermal conductive medium (such as silicone oil) is within the scale range, and avoid mixing media of different viscosities (≤ 500C · S · t).
Connect the power supply (380V/50Hz) to the external circulation pipeline, ensuring that the interface is sealed and leak free to prevent safety hazards caused by medium evaporation at high temperatures.
2. Monitoring during operation
When setting the target temperature, the temperature range should be selected according to the experimental requirements to avoid exceeding the rated range of the equipment.
Real time observation of pressure gauge (≤ 12kPa) and temperature curve. If there is an abnormal alarm, the machine should be stopped immediately to troubleshoot.
  3、 Maintenance points: "preventive strategies" to extend equipment lifespan
1. Daily cleaning
Clean the condenser dust every week and disassemble the filter screen for cleaning every month to prevent impurities from blocking the pipeline and affecting the circulation efficiency.
2. Media management
Check the color and clarity of the thermal conductive medium every 6 months. If turbidity or discoloration occurs, replace the medium with a new one. Due to the long-term use of inferior media, the heat exchanger of a certain model of equipment has been blocked, and the repair cost has reached 30% of the original price of the equipment.
3. Long term shutdown protection
When the equipment is not in use for more than 15 days, the medium in the pipeline should be emptied, the power should be cut off, and a dust cover should be covered. Every 3 months, the compressor and motor should be turned on and run without load for 30 minutes, and the sound of operation should be checked.
From the laboratory to the production line, the calibration regulations for sealed high and low temperature integrated machines are not only the "physical examination standards" for equipment performance, but also the core defense line to ensure scientific research and production safety. Through standardized operations and preventive maintenance, equipment stability can be significantly improved, providing reliable temperature control support for high-precision scenarios such as semiconductor wafer manufacturing and vaccine solution filtration.