1、 Overview

The Roots rotary vane vacuum unit is an efficient, multi-stage combination vacuum pumping system consisting of Roots pumps and rotary vane vacuum pumps connected in series. This unit combines the high pumping speed capability of Roots pumps and the high compression ratio advantage of rotary vane pumps, and is widely used in industrial fields that require medium to high vacuum (10 ⁻²~10 ⁻⁴ Pa), such as semiconductor manufacturing, vacuum coating, pharmaceutical and chemical industries.

2、 Working principle

1. Roots pump (main pump)

Using a pair of synchronous reverse rotating impellers (rotors), gas is pushed from the inlet to the outlet through non-contact engagement.

No internal compression, relying on high-speed rotation to achieve high pumping speed (up to 1000~20000 m ³/h).

It needs to be used in conjunction with a front-end pump (rotary vane pump), as the Roots pump itself cannot directly discharge high-pressure gas.

2. Rotary vane pump (front stage pump)

By compressing and discharging the gas through an eccentric rotor and rotor, a primary vacuum is provided (with a maximum vacuum of approximately 10 ⁻ ² Pa).

Create a low back pressure environment for Roots pumps to ensure efficient operation of the unit.

3. Collaborative workflow

The gas is first pumped to the medium vacuum range (1-10 Pa) by a rotary vane pump, and then the Roots pump is started to further increase the vacuum degree to a higher level.

3、 Technical features

1. Efficient and energy-saving

Roots pumps have significantly higher pumping speeds in the low-pressure range than single-stage rotary vane pumps, and their energy consumption is reduced by 30% to 50% compared to traditional units.

2. Broad scope of work

Covering from medium vacuum to high vacuum (10 ⁵~10 ⁻⁴ Pa) to adapt to changing process requirements.

3. Low vibration and low pollution

The oil-free design of Roots pump reduces pollution, and the rotary vane pump can be lubricated with oil or dry (oil-free rotary vane pump) to meet cleanliness requirements.

4. Intelligent control

Modern units are equipped with PLC control systems that automatically adjust pump speed, overload protection, and start stop sequence.

4、 Typical application scenarios

1. Photovoltaics and Semiconductors

• Used for maintaining vacuum environment in wafer coating and etching equipment.

2. Chemical and Pharmaceutical Industry

• Solvent recovery, vacuum drying, molecular distillation and other processes.

3. Research and Laboratory

Synchrotron radiation device, vacuum freeze dryer, etc.

4. Food packaging

Quickly remove air from the packaging to extend the shelf life.