Composite molecular pump is an efficient vacuum pump that can provide high-temperature steam through electron beam heating. The steam bounces back from the inner surface to achieve a high degree of vacuum effect. It is an ideal equipment for gas and solid substrate generation, cleaning, and flow sensor testing in high vacuum environments. Composite molecular pumps combine the characteristics of molecular pumps and diffusion pumps, with high pumping speed, high ultimate vacuum, small dust accumulation, and good stability. They are widely used in fields such as copper hydrogen gasification film formation, metal evaporation, photolithography, plasma etching, high-energy physics experiments, and television tube manufacturing.
The working principle of a composite molecular pump is to use special high temperature and high speed to operate. When the pump is started, the graphite material inside the vaporizer is heated, and the liquid or solid substance is converted into gaseous vapor and begins to conduct to the pump head. The pump head forms a high-speed rotating airflow, and gas enters the molecular pump through the rotating airflow. Inside the molecular pump, gas molecules will be induced to generate high-speed and uniform heat, further collide and accelerate, and ultimately become an extremely empty airflow. The polar airflow will be further accelerated by a diffusion pump, reaching a speed greater than 1000m/s, and then discharged into the atmosphere.
Composite molecular pumps are widely used due to their high efficiency and stability, with the following advantages:
1. Efficient. The pumping speed of the composite molecular pump is higher than that of the barrel molecular pump, with a shorter braking distance and lower ash accumulation rate.
2. High vacuum degree. Due to working at high temperatures, composite molecular pumps can achieve high vacuum levels and are ideal equipment for manufacturing high-precision components.
3. Good stability. The components of the pump head assembly of the composite molecular pump are precision machined and lubricated to reduce vibration and noise caused by friction and wear.
In summary, composite molecular pumps are one of the widely used vacuum pumps in high vacuum technology, which can provide stable, efficient, and reliable operation, and assist laboratory research and industrial manufacturing.