The diffusion pump unit plays a crucial role in vacuum coating machines, and its maintenance and application methods are essential to ensure the normal operation of the equipment and extend its service life. The following are specific suggestions for the maintenance and application of diffusion pump units:

Maintenance methods for diffusion pump units

• Cooling water management: During operation, it is necessary to ensure smooth supply of cooling water. After stopping heating, wait for the pump working fluid to cool down before turning off the cooling water.

Vacuum state management: When the diffusion pump stops working, its internal vacuum state should be maintained to prevent pump oil degradation. When stored for a long time, it should also be kept in a vacuum state and the remaining moisture in the cooling water jacket should be removed.

Gas management: The extracted gas must be kept dry, non corrosive, and dust-free to ensure the normal operation of the diffusion pump.

Regular inspection: Regularly check the performance of the pump, including whether the pump oil has decreased or oxidized, and the cleanliness of the parts and pump chamber. If necessary, perform refueling, oil change or cleaning treatment.

• Leak detection before restart: Leak detection work must be carried out before restart to ensure that there are no hidden gas leaks at the connection.

Application method of diffusion pump unit

Installation and assembly: When reassembling, the pump core should be kept perpendicular to the pump bottom and concentric with the pump chamber, and the clearance between each nozzle should be adjusted according to the original requirements.

• Cleaning and drying: When cleaning parts and pump chambers, first clean them with aviation gasoline, then scrub them with acetone, and dry them at 80-100 degrees Celsius or blow dry them with a hair dryer.

• Start condition: Heating can only be carried out when the pre stage vacuum degree of the diffusion pump is reached, otherwise it will accelerate the oxidation of the pump oil.

Management of the front-end mechanical pump: Pay attention to the working condition of the front-end mechanical pump, as its performance directly affects the normal operation of the oil diffusion pump.

By applying the above maintenance methods, the service life of the diffusion pump unit can be effectively extended, ensuring its efficient and stable operation.