Turbomolecular pump is a mechanical vacuum pump that obtains ultra-high vacuum by carrying gas molecules with a high-speed rotating rotor. It is composed of a dynamic impeller and a static impeller, which is more energy-efficient and free of oil and steam pollution than diffusion pumps. At the same time, it has the characteristics of high pumping speed and high compression ratio during molecular flow. It is currently the largest pumping speed molecular pump in China. The dynamic impeller is processed with variable cross-section, which increases its strength and reduces weight, making the performance of the molecular pump more reliable and stable.
Precautions for Operation of Turbomolecular Pump
♦ Do not stop the turbo molecular pump when the front stage pump is working (the front stage pipeline is connected) and the vacuum chamber is in a vacuum state, otherwise oil vapor will quickly flow back from the front stage pipeline to the clean end of the pump.
♦ Before the molecular pump system is shut down and filled with dry gas, the cooling water of the molecular pump must be turned off first, and the gas must be filled from the high vacuum end of the pump. Never inflate from the front stage pipeline of the pump.
♦ When selecting the size of the front-end pump of the system, the front-end of the turbo molecular pump should be kept in a molecular flow state.
♦ Do not allow the turbo molecular pump to operate below its rated operating speed.
♦ A protective net should be installed at the inlet of the molecular pump to prevent foreign objects from entering the pump and damaging the pump rotor and stator blades.
The application fields of turbomolecular pumps include but are not limited to:
♦ Analysis (mass spectrometer, electron microscope, etc.).
♦ Semiconductor industry (electronic components, integrated circuits, solar cells, etc.).
♦ Optical/glass industry (heat-resistant, anti reflective, reflective, optical filter coatings, etc.).
♦ Coating technology (surface protection, decorative coatings, displays, screens, etc.).
♦ Vacuum smelting (vacuum welding, vacuum sintering, vacuum alloys, vacuum furnaces, etc.).
♦ Leak detection technology (vacuum equipment, vehicle fuel tanks, airbags, packaging, etc.).
♦ Research equipment (nuclear physics, fusion reaction research, laser applications, etc.).
♦ The lighting industry (bulb production).