Online 0.1 μ m dust particle counter

NegotiableUpdate on 01/07

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The ET-R101FS laser dust particle counter is one of the products of Suzhou Yitai Environmental Technology Co., Ltd.'s online monitoring system. The minimum particle size range for detection can reach 0.1 μ m, and it can detect clean environments of ISO7-ISO1 with a sampling flow rate of 2.83L/min. It is specially designed for high-precision clean environment detection in the semiconductor industry, breaking through traditional accuracy limitations and accurately capturing submicron pollution particles generated by photoresist evaporation and equipment wear, meeting the strict requirements of ISO 1 cleanliness for nano processes. The online 0.1 μ m dust particle counter has high detection accuracy, user-friendly interface, and simple operation.

Product Details

ET-R101FS Laser Dust Particle Counter (Online)

Brand: etiedt Yitai Jingke

在线0.1μm尘埃粒子计数器

1、 Overview:

The ET-R101FS laser dust particle counter is one of the products of Suzhou Yitai Environmental Technology Co., Ltd.'s online monitoring system. Detect the minimum particle size range that can be reached0.1μmIt can detect the clean environment of ISO7-ISO1, with a sampling flow rate of 2.83L/min. It is specially designed for high-precision clean environment detection in the semiconductor industry, breaking through the limitations of traditional accuracy and accurately capturing submicron pollution particles generated by photoresist evaporation and equipment wear, meeting the strict requirements of ISO 1 cleanliness for nano processes. The instrument has high detection accuracy, friendly human-machine interface, rich functions, and simple operation.

This product can be widely used insemiconductor、ElectronicsopticsNew energy, precision machinery,Chemistry, pharmaceuticals and healthcare, biological products, aerospace，Waiting for the department.

2、 Characteristics:

◆ 304 stainless steel shell (customizable aviation aluminum)

5.0 ultra large high-definition color touch screen, easy to operate

The minimum detection particle size is 0.1 μ m, with eight channels

About 5 million data storage+USB data export+cloud connectivity

◆ Support SCADA/MES system integration

ESD safety intelligent power management system

ISO 14644-1 Cleanliness Level Report Automatically Generated

◆ Active flow control PID automatic adjustment

◆ Customized explosion-proof requirements, explosion-proof only applies to the shell explosion-proof, and specific customization is carried out according to customer needs.

3、 Performance:

◆Sampling flow rate: 2.83L/min ±5% （0.1 CFM）
◆Particle size distribution error；Nationally Recognized Excellence±20%FS
◆Indication concentration error；Nationally Recognized Excellence±20%FS
◆self-cleaning time；Nationally Recognized Excellence≤8min
◆Repetitive relative error；Nationally Recognized Excellence≤8%FS
◆Sampling concentration,35000 pieces/liter
◆tofew5000000 pieces of sampled data storage

4、 Application:

Semiconductor cleanroom testing;

Monitoring of wafer packaging product line;

Photolithography production line monitoring;

Precision optics;

New energy;

Aerospace;

5、 Technical parameters:

sampling flow	2.83L/min
Particle size grading	Eight channels:0.1μm,0.15μm,0.2μm,0.25μm,0.3μm,0.5μm, 1.0μm, 5.0μm
laser light source	Long life laser diode, lifespan>35000 hours
Sampling concentration	1000000 per cubic foot
samplingpattern	continuous sampling+Real time counting, interval sampling, cumulative counting
Counting efficiency	50%@0.1μm； 100%@＞0.15μm 符合 ISO21501-4
sampling delay	User self setting
sampling interval	User self setting
communication protocol	Modbus
contact method	RS485、Internet
Data memory capacity	about5 millionGroup measurement data, searchable，export
screen display	5.0colorfulHDtouch screen
Printing method	Online version is not supported
electricity source	DC12V (9-28VDC) output power not less than 12V3A
reference standard	ISO 21501-4、GBT29024.4-2017、JJF1190-2008
Data communication interface	USB（Directly export orView IOT online monitoring system），RS485、RJ45
ring realm	Usage environment:10∽40℃ Relative humidity 20 ∽95%RH
	Storage environment:-20 ℃∽ 45 ℃ Relative humidity 0 ∽95%RH
	Atmospheric pressure:86-106kPa
Standard Accessories	Waiting for power sampling head, sampling head hose, self-cleaning filter, user manual, original calibration report, certificate of conformity, etc
Overall dimensions	wide220Mm x height162Mm x depth130Mm (excluding)Sampling port, alarm light）
material quality	304stainless steel
heavy quantity	2.8Kg

6、 Etiedt Yitai Jingke:

Suzhou Yitai Environmental Technology Co., Ltd. is a leading professional enterprise in the intelligent and innovative application of domestic clean environment detection instruments;

New forces replacing domestic brands with imported instruments;

Domestic purification brand service provider, high-quality purification service provider;

Professional enterprise providing a complete solution for intelligent monitoring instruments for clean microenvironment

Semiconductor clean environment detection, Yitai Jingke E-series laser dust particle counter detection level can meet environmental detection levels from level 10 to 300000;

Online 0.1 μ m dust particle counterOnline monitoring system;

Online 0.1 μ m dust particle counterRemote Environmental Online Monitoring System