Turbomolecular pump

ZYFB-3600Turbomolecular pump

Technical Specifications Table

model

ZYFB-3600 inlet flange

400 ISO-K exhaust flange

100 ISO-K

Extraction rate (L/S) (for air) 3600

compression ratio

N2>108 H2>6X102

Ultimate pressure (Pa)<2 × 10-6

Rated speed (rpm) 12600

Using bearings

Imported ceramic bearings

Vibration value ≤ 0.15 μ m

Start time (min)<10

Shutdown time (min)<20

Suggested front-end pump (L/S) 30

Cooling method: Water cooling

Cooling water temperature (℃) ≤ 20

Cooling water flow rate (L/min) 1

Pump body baking temperature (℃)<80

Environmental temperature (℃) 5-40

Installation direction

Vertical ± 5 °

Pump weight (kg) ≈ 100

ZYFB-3600Turbomolecular pump

It is a mechanical vacuum pump that uses a high-speed rotating rotor to carry gas molecules and obtain ultra-high vacuum. It is composed of a moving impeller and a stationary impeller, which is more energy-efficient and free of oil and steam pollution than a diffusion pump. At the same time, it has the characteristics of high pumping speed and high compression ratio during molecular flow. It is currently the largest pumping speed molecular pump in China. The moving impeller is processed with variable cross-section, which increases its strength and reduces weight, making the performance of the molecular pump more reliable and stable.

This molecular pump has no selectivity or memory effect on the gas being pumped. Due to its high compression ratio for gases with large molecular weights, the pump does not require a cold trap or oil baffle to achieve clean high and ultra-high vacuum. It is widely used in various fields such as electronics, metallurgy, chemical engineering, scientific research, and vacuum technology.