HSCOL-2D series clean oven

Characteristics of dust-free clean oven:

The HSCOL-2D series dust-free oven is used for pre-treatment baking before coating silicon wafers, gallium arsenide, lithium niobate, glass and other materials in semiconductor manufacturing, hard film baking after coating, and high-temperature baking after development, with forced air circulation mode. Double air duct circulation structure, uniform temperature field distribution, intelligent P.I.D temperature control system, achieving excellent temperature control accuracy. The dust-free clean oven is suitable for electronic LCD displays LCD、CMOS、IS、 Pharmaceutical, laboratory and other production and research departments. Clean ovens can also be used for drying, heat treatment, aging, and other high-temperature tests of non-volatile and non flammable and non explosive materials.

Detailed information on dust-free clean oven:

1、 Characteristics:
1. When used in a normal environment, it can ensure that the internal level of the oven reaches Class 10
2. Full week argon welding, high temperature resistant silicone gel rupture, SUS304 # stainless steel electric heater, to prevent dust generated by the machine itself;
3. Imported SUS304 # Japanese made 800mm thick mirror stainless steel plate is used, and it is cleaned with alkaline soda water to remove oil stains and avoid the formation of PARTTICLE during baking;
4. The air is horizontally supplied from the back to the front through the H.E.P.A Filter 20 "× 20" device imported from the United States and directed towards the front door (with a special air duct design). The filtration efficiency is 99.99%, Class 10, and the exhaust port is 3 "φ (with automatic opening and closing air door)

2、 Clean oven execution and compliance with standards
1. GB/T11158-1989 Technical Conditions for High Temperature Test Chamber
GB2423.2-1989 Test B

3、 Application of Clean Oven
The dust-free clean oven is suitable for electronic LCD displays LCD、CMOS、IS、 Pharmaceutical, laboratory and other production and research departments.
A dust-free clean oven can also be used for drying, heat treatment, aging, and other high-temperature tests of non-volatile and non flammable and non explosive materials.

4、 Technical parameters of clean oven
1. Name and model: Dust free clean oven HSCOL-2D
2. Main technical indicators:
2.1 Dust free level: Class 10;
2.2 Temperature range: 60~+300 ℃;
2.3 Temperature uniformity: 200 ℃± 3 ℃, 300 ℃± 4 ℃;
2.4 Temperature fluctuation: ± 0.5 ℃ (no load)
2.5 Temperature control accuracy: ± 0.1 ℃;
2.6 The clean oven shelf is in a movable form. (Two box type)
2.7 Power Supply: 380V, 50Hz, 12Kw

3. Clean oven box structure:
3.1 The clean oven is assembled from the box body, electrical control cabinet, electric heating and air duct system, with a reasonable structure and a beautiful and elegant appearance;
3.2 Full week argon welding, high temperature resistant silicone compression, SUS304 # stainless steel electric heating generator, to prevent the machine itself from generating dust;
3.3 Box Material: The outer box is made of SS41 # medium carbon steel plate treated with phosphate film salt and coated with two layers of anti gloss paint to prevent dust;
3.4 Inner liner material: Imported SUS304 # Japanese made 800 series 2mm thick mirror stainless steel plate is used, and cleaned with alkaline soda water to remove oil stains and avoid the formation of PART during baking;
3.5 Medium bucket material: Made of imported SUS304 # Japanese 800mm thick mirror stainless steel plate, cleaned with alkaline soda water, degreased and sealed with argon welding (anti pollution).

4. Temperature control system
4.1 Adopting the Japanese OMRON E5A temperature controller, the clean oven controller features LED digital display and setting, PID automatic calculation, and film setting, with an accuracy of ± 0.3% FS.;
4.2 Signal source: Imported CA induction rod made in Japan with a tolerance of ± 0.5%.
4.3 Output controlled component: SSR non-contact signal output.

5. Comprehensive security measures:
Leakage circuit breaker
Control circuit fuse device
Overtemperature prevention protection device
Electric heating overcurrent protection device
Motor overcurrent protection
Machine malfunction buzzer warning
Reverse preventer
Facade safety switch

6. Clean oven equipment selection:
6.1 Programmable thermostat
6.2 Six point temperature recorder
6.3 Tri color indicator light
6.4 Grille grill