High temperature four probe resistivity tester

One Overview of BEST-351 High Temperature Four Probe Electrical Resistance Testing System:
Using a four probe dual electric combination measurement method to test square resistance and resistivity, the system is combined with a high-temperature box to configure a high-temperature four probe test probe fixture and PC software for data processing and measurement control, solving the measurement requirements of semiconductor material conductivity for temperature changes. The software real-time draws the change curve graphs of temperature and resistance, resistivity, and conductivity data, as well as the report analysis of process data values
II Applicable industries:
Used for measuring the resistivity of conductive ceramics, silicon, germanium single crystals (rods, chips), determining the block resistance of silicon epitaxial layers, diffusion layers, and ion implantation layers, as well as measuring the block resistance, resistivity, and conductivity data of new materials such as conductive glass (ITO) and other conductive thin films in enterprises, universities, and research departments
The dual electric four probe instrument uses linear four probe dual position measurement. Design based on the physical testing methods of monocrystalline silicon and refer to the American A.S.T.M standards.
III Model and parameters:
Specification and model FT-351A FT-351B FT-351C
Block resistance range 10-5~2 × 105 Ω 10-6~2 × 105 Ω 10-4~1 × 107 Ω
The resistivity range is 10-6~2 × 106 Ω - cm 10-7~2 × 106 Ω - cm 10-5~2 × 108 Ω - cm
Test current range: 0.1 μ A, μ A, 0 μ A, 100 μ A, 1mA, 10mA, 100 mA 1A, 100mA, 10mA, 1mA, 100uA, 10uA, 1uA, 0.1uA, 10mA? ---200pA
Current accuracy ± 0.1% reading ± 0.1 reading ± 2%
Resistance accuracy ≤ 0.3% ≤ 0.3% ≤ 10%
PC software interface display: resistance, resistivity, square resistance, temperature, unit conversion, temperature coefficient, current, voltage, probe shape, probe spacing, thickness, conductivity
Testing method: Dual electric measurement
Four probe instrument working power supply AC 220V ± 10%. 50Hz<30W

Error ≤ 3% (standard sample result ≤ 15%)
Temperature (optional)
Room temperature -400 ℃; 600℃； 800℃； 1000℃； 1200℃； 1400℃； 1600℃
Atmosphere protection (gas to be provided by customers) commonly used gases include helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe), radon (Rn), all of which are colorless, odorless, and gaseous single atomic molecules
Temperature accuracy impulse temperature value: ≤ 1-3 ℃; Temperature control accuracy: ± 1 ° C
Heating rate: Starting from room temperature, it takes 15 minutes to reach 400 ℃ to 800 ℃; 800 ℃ -1200 ℃ takes 30 minutes; 1400 ℃ -1600 ℃ takes 250-300 minutes
High temperature materials are made of composite ceramic fiber materials, which have the characteristics of vacuum forming and no powder shedding at high temperatures
pc software
Test a set of PC software, USB communication interface, software interface synchronously displays, analyzes, saves and prints data!
Electrode material: tungsten electrode or molybdenum electrode
Probe spacing
Linear probe, probe center spacing: 4mm; sample requires a diameter greater than 13mm
Standard configuration (optional):
1 set of computer and printer; 2. 1-5 standard resistors

High temperature power supply:
Power supply: 400-1200 ℃ power supply 220V, power 4KW; 380V; 1400 ℃ -1600 ℃ power supply 380V; power 9KW:

Supporting solution: Solve the measurement of various material states - solid, liquid, gas, granular resistance, resistivity, conductivity