Park Systems Atomic Force Microscope NX10

Accurate imaging,No cross coupling phenomenon

Superior XYZ axis linearity in the industry, with samples and probes controlled by independent flexible guidance scanners for movement

*Low plane offset, with a plane offset of no more than 1 nanometer during full horizontal scanning

When the vertical scanner is fully extended and retracted, the linearity is better than 0.015%

Optimized horizontal scanner ringing phenomenon, scientific forward sine scan algorithm

Accurate scanning, true non-contact mode

Industry leading vertical scanner with bandwidth exceeding 9kHz and probe vertical servo response speed exceeding 62mm/sec

Fast scanning speed in non-contact mode

Extremely low probe wear, ensuring long-term high-quality scanning

Extremely low sample damage

Accurate measurement, true sample morphology

Using industry-leading low-noise hysteresis detectors to measure sample morphology

Industry leading minimal positive and negative measurement deviation, less than 0.15%

By using optimized heat dissipation components, the system's thermal drift and hysteresis are greatly reduced

Powerful advanced soundproof cover, active temperature control inside the cabin, user work efficiency

Open design for easy replacement of probes and samples

Probe pre positioning clamping design, simple and convenient measurement of laser adjustment process, with a brick like intuitive observation system from top to bottom

**The "ten second needle insertion" function allows the probe to automatically complete the needle insertion operation at high speed

24 digit electronic control box, three sets of built-in latch amplifiers, with Q-control and elastic constant calibration functions

Technical Specifications

XYscanner

Closed loop control single module flexible XY scanner

Scanning range: 50

μ m × 50 μ m (optional 100 μ m)

μm × 100 μm)

resolving power:

0.05 nmLocalization detection noise:<0.3 nm (bandwidth: 1 kHz)

Horizontal linearity:<2nm (over 40)

μm scan)

Z

scanner

Flexible guided high-intensity scanner

Scanning range: 15

μ m (optional 30 μ m)

resolving power:

0.015 nm

Localization detection noise: 0.03 nm (bandwidth: 1 kHz)

Resonance frequency:

> 9 kHz (typically 10.5 kHz)

Surface imaging noise:<0.03 nm (0.02 nm typical)

optical system

Direct view coaxial optical system for observable samples and probes
视场: 480
× 360 μm (10× objective lens)

CCD: 1M pixels (pixel resolution: 0.4 μ m)
objective lens
10x (0.21 NA) ultra long working range lens (1 μ m resolution)

20x (0.42 NA) high-resolution long working range lens (0.6 μ m resolution)

signal processing

ADC: 18 channels

4 high-speed ADC channels (50 MSPS)

X. 24 bit ADCs for positioning sensors of Y and Z scanners

DAC: 12 channels

2 high-speed DAC channels (50 MSPS)

X. 20 bit DACs located by Y and Z scanners