Park Systems NX Hivac High Vacuum Atomic Force Microscope

Park NX Hivac improves measurement sensitivity and repeatability of atomic force microscopy measurements by providing high vacuum environments for failure analysis engineers. Compared to general environments or dry N₂Compared with other conditions, high vacuum measurement has the advantages of high accuracy, good repeatability, and low damage to the needle tip and sample. Therefore, users can measure many signal responses in various fault analysis applications, such as dopant concentration in scanning diffusion resistance microscopy (SSRM).

Park

NX Hivac enables material science research in vacuum environments with high precision and resolution measurements, away from the influence of oxygen and other agents.

Performing scanning diffusion resistance microscopy measurements under high vacuum conditions can reduce the required needle sample interaction force, thereby significantly reducing damage to the sample and needle tip. This can extend the service life of each needle tip, make scanning more cost-effective and convenient, and obtain more accurate results by improving spatial resolution and signal-to-noise ratio. Therefore, using NX Hivac for high vacuum scanning diffusion resistance microscopy measurement can be considered a wise choice for fault analysis engineers to increase their throughput, reduce costs, and improve accuracy.Park Hivac

Manager

NX Hivac vacuum automatic control

Hivac Manager achieves high vacuum by logically and visually controlling the optimal vacuum conditions for pumping and exhausting processes with just one click. Each process is visually monitored through color and graphic changes, and with just one click, you don't have to worry about the vacuum operation sequence. Faster and simpler vacuum control software makes the use of atomic force microscopy more convenient and efficient.

Superior automation features

NX Hivac has a large number of features that can greatly reduce user input. In other words, you can scan faster and increase laboratory productivity.Equipped with an electrically controlled loading platformStepScan

Automated scanning

StepScan allows users to program devices for fast and convenient multi area imaging. NX Hivac allows you to complete sample scanning in just five steps: scanning, lifting the cantilever, moving the electric platform to a user-defined coordinate area, needle insertion, and repeated scanning. This can greatly improve productivity and minimize user input.

Electric laser alignment

Park electric laser alignment allows users to seamlessly connect automated measurement routines without the need for input. With our advanced pre collimated cantilever frame, the laser is aligned with the cantilever when replacing the probe. Simply adjust the positioning knob to freely position the laser spot on the X and Y axes, achieving the optimal position.

Improve accuracy and productivity

NX Hivac is not only the world's most accurate high-performance atomic force microscope, but also one of the simplest and most convenient atomic force microscopes used for fault analysis. ParkNX Hivac can help you improve your productivity and ensure reliable results.closed loopXYand

Z

Axis scannerBy using two independent closed-loop XY and Z-axis deflection scanners, you can be confident in the high accuracy of scanning. NX Hivac provides low residual bending planar and orthogonal XY axis scanning, resulting in an out of plane motion distance of less than 1 nm throughout the entire scanning range. In addition, NX Hivac's feature is a high-speed Z-axis scanner with a non-linear 15 μ m scanning range of less than 0.5%, which can obtain accurate two-dimensional and three-dimensional measurements without software post-processing.low noise

XYZ

24Axis position sensor

NX Hivac has the superior low-noise Z-axis detector function in the Park atomic force microscope industry, which can accurately measure sample morphology. At the same time, low-noise XY axis closed-loop scanning reduces the front and rear scanning gap to 0.15% of the scanning range.