High power DC magnetron sputtering coating instrument

NegotiableUpdate on 08/04

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

Brief introduction: The high-power DC magnetron sputtering coating machine is a high-power desktop magnetron plasma sputtering coating machine, equipped with a water-cooled 2-inch target head, a chiller, and a rotatable sample holder. The high-power DC magnetron sputtering coating instrument is designed for coating all metal thin films with a diameter of up to 4 inches, including Zn, Al, Ti, and carbon films, at a reasonable price. Include an Al target for immediate use.

Product Details

Details introduction:

High power DC magnetron sputtering coating instrument Product content:

The high-power DC magnetron sputtering coating instrument includes a 2-inch water-cooled target head and a rotatable sample stage. The water-cooled target head ensures that the surface of the coated sample will not deform or even damage the sample due to excessive coating temperature; The sample table can be rotated so that the sample can be coated while rotating so that the facial mask of the coated sample surface is even after coating. The device has a compact appearance and high cost-effectiveness, making it an ideal coating equipment for producing various metal thin films. It can be equipped with various metal target materials and vacuum pumps for use with the equipment.

Technical specifications of high-power DC magnetron sputtering coating instrument:

INPUT VOLTAGE	220 C 50/60Hz ,use1000 WTransformer（15 AFuses can be obtained110 Vpower supply
output power	1600 VDC 250 W 150 mA max. Built in overcurrent protection(>150 mA)
specimen chamber	quartz glass tube, 165 mmoutside diameter×150 mminside diameter×250 mmheight
Sputtering head and sample stage	include2'Flexible magnetron sputtering head with water-cooled jacket. A diameter50 mmThe stainless steel sample table can be used0-5 RPMRotate within the range. A manually operated shutter is used to protect the target. The sputtering head holder can be used to hold the sputtering head when not in operation. The distance between the sputtering head and the sample stage can be60-100mmAdjust between them. MaxCoating area: 4'diametermax. one Air cooled circulating chiller unit10 L / minFlow rate, including cooling sputtering head.
control panel	6“Color touch screen control panel,PLCIntegrated and easy to operate One panel for monitoring and controlling all parameters: vacuum, current.
Ultimate vacuum pressure	built-inKF25vacuum port This system requires a pressure regulatorArGas cylinder. (Excluding) used forAu、Ag、Pt、Cu、MoThe target'sVaneVacuum pump (excluding)<1.0E-2 Torr(Not sensitive to air) Turbomolecular pump (excluding)<1.0E-5 Torrused forAl、Mg、Li、Lr、Ti、ZnTarget (sensitive to air) By continuous suction and baking,zuiLow vacuum can be achieved<4.0E-6support from under
atmosphere	Install a needle valve that allowsArGas inlet achieves better plasma coating This system requires a pressure regulatorArGas cylinder (not included)
target	Including one2Inch copper target for testing, target size:2Inch diameter×2.5mm. It can also be coatedAg，Al，Cr，Ni，Pt，Ti，Sn，Li，MgAlmost all types of metal materials. Warning: This machine can be coated with aluminum, chromium, or nickel targets But please check the recommended coating method before use. please useRFPlasma magnetron sputtering coating of alumina
Overall size	L 440 mm×W 330 mm × H 290 mm
net weight	20 kg
after-sale service	After the goods are shipped,CYKYProvide one year of free after-sales service, limited to remote technical support such as telephone guidance, video guidance, email guidance, and parts mailing. If on-site service is required, the customer needs to pay for the travel expenses and wages of the service personnel during the business trip.

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