Small single target magnetron sputtering coating instrument

NegotiableUpdate on 08/04

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

Brief introduction: The small single target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, with the characteristics of miniaturization and standardization. Magnetron targets are available in 1-inch and 2-inch sizes, and customers can choose according to the size of the coated substrate

Product Details

Details introduction:

The small single target magnetron sputtering coating instrument is a cost-effective magnetron sputtering coating equipment independently developed by our company, with the characteristics of miniaturization and standardization. Magnetron targets are available in 1-inch and 2-inch sizes, and customers can choose according to the size of the coated substrate; The power supply provided is a 150W DC power supply, which can be used for metal sputtering coating. The coating machine is equipped with a ventilation interface, which can introduce protective gas. If customers need to introduce mixed gas, they can contact the staff to configure a high-precision mass flow meter to meet the experimental needs. The instrument comes standard with an advanced turbo molecular pump set, with a maximum vacuum of 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Small single target magnetron sputtering coating instrumentScope of application:

This device can be used to prepare single-layer ferroelectric thin films, conductive thin films, alloy thin films, etc. Compared with similar equipment, this single target magnetron sputtering coating instrument has been designed to be miniaturized, highly integrated, and compact in size. It can be placed on a desktop for use and is an ideal equipment for preparing material thin films in the laboratory.

Small single target magnetron sputtering coating instrumentTechnical parameters:

Small single target magnetron sputtering coating instrument
sample stage	size	φ138mm	precision	±1℃
sample stage	Heating temperature	*High500℃	rotational speed	1-20rpmadjustable
Magnetron sputtering head	quantity	2” x1（1”,2”Optional)	Water cooling machine specifications	10L/minCirculating water cooler with flow rate
Magnetron sputtering head	Cooling method	water-cooling
Vacuum Chamber	Cavity Size	φ180mm × 215mm	view window	Omnidirectional transparency
Vacuum Chamber	Material of the cavity	high-purity quartz	Opening method	Top cover detachable type
vacuum system	PRODUCT MODEL	CY-GZK103-A	Extraction interface	KF40
	molecular pump	CY-600	Exhaust interface	KF16
	Front pole pump	Rotary vane pump	vacuum measurement	Composite vacuum gauge
	mbar	1.0E-5Pa	power supply	AC;220V 50/60Hz
	pumping speed	Molecular pump:600L/S Rotary vane pump:1.1L/S Comprehensive pumping performance:20The vacuum degree can reach:1.0E-3Pa
Power	quantity	DC power supply×1	*High output power	150W
other	Supply Voltage	AC220V,50Hz	Dimensions	500mm × 350mm × 400mm
	Whole machine power	1.7KW (vacuum pump set 1.5KW+local machine 0.2KW)	Whole machine weight	30kg